Automatic analysis controller

Automatic analysis controller capable of automated analysis of active ingredient concentrations and automated replenishment of chemical polishing liquids and development/stripping liquids, with effective power savings

A controller performing automated analysis of the active ingredient concentrations of chemical polishing liquids as well as stripping liquids and a supply (replenisher) apparatus are combined in a compact unit.This is a device intended to maintain concentrations, achieve uniform finishing, and extend liquid life through the automated supply of replenishers for chemical polishing liquids and development/stripping liquids.

• It has superior repeat precision.
• It accurately calculates the shortfall to the target concentration, and also calculates the additional amount to be replenished.
• Operation is easy with simple parameters.